Method and apparatus for teaching a workpiece transfer robot

A program product for use in conjunction with a controller coupled to a workpiece transfer robot having an end effector and to a light sensor having an optical input, the light sensor coupled to a processing chamber pedestal assembly, the program product comprising:

• a transfer robot teaching program adapted to:
• record sensor signal gain versus end effector position data as the end effector is moved over the optical input;
• and
• determine from the sensor signal gain versus end effector position data the position at which the end effector is optimally located with respect to the pedestal assembly;
• and
• non-transitory computer-readable medium bearing the transfer robot teaching program.

An apparatus for teaching a transfer robot employed within a workpiece processing system of the type which includes a workpiece transfer robot having an end effector and a processing chamber containing a pedestal assembly and a light source, the transfer robot teaching apparatus comprising:

• a light sensor having an optical input fixedly coupled to the pedestal assembly;
• a through beam sensor coupled to the processing chamber so as to project a beam through the processing chamber;
• and
• a controller coupled to the light sensor, the workpiece transfer robot, and the through beam sensor, the controller configured to:
• record light sensor signal gain-versus-end effector position data as the end effector is moved over the optical input and light is produced by the light source;
• determine from the recorded light sensor signal gin the position at which the end effector is located with respect to the pedestal assembly;
• and
• determine from the through beam sensor a desired vertical position, of the end effector for workpiece transfer utilizing the through beam optical sensor.