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US 8,096,147 B2Granted
Methods to fabricate a photoactive substrate suitable for shaped glass structures
AssigneeLife Bioscience, Inc.
InventorsJeb H. Flemming, Colin T. Buckley, Carrie Schmidt
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Abstract
This invention provides an inexpensive and rapid method for fabricating a high-anisotropic-etch ratio, shaped glass structures using a novel photosensitive glass composition. Structures of the photosensitive glass may include micro-channels, micro-optics, microposts, or arrays of hollow micro-needles. Furthermore, such shaped glass structures can be used to form a negative mold for casting the shape in other materials.
Claims6
A method to fabricate a shaped glass structure, comprising:
- preparing a photosensitive glass substrate having a composition comprising:
- less than 76 weight % silica, at least 0.15 weight % Ag2O, at least 0.75 weight % B2O3, at least 11 weight % Li2O, and at least 0.0014 weight % CeO2;
- exposing at least one portion of the photosensitive glass substrate with an activating energy source, such as ultraviolet light (300 to 320 nm) or a directed source of protons using an activation exposure of 0.1-15 J/cm2, while leaving at least a second portion of said glass substrate unexposed;
- heating the glass substrate for at least ten minutes at a temperature that is in a temperature range of 420-520° C., heating the glass substrate for at least ten minutes at a temperature that is in a temperature range of 520-620° C., and cooling the glass substrate thereby transforming at least part of the exposed glass substrate to a crystalline material;
- and
- etching the glass substrate in an HF-containing etchant solution, wherein an etch ratio of exposed portion to said unexposed portion is at least 40:1, to provide a shaped glass structure.
3 more elements
Dependencies are inferred from the claim text.