US 8,087,288 B1 · Scanning stylus atomic force microscope with cantilever tracking and optical access

Abstract

A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.

Claims3

Dependent claims

An atomic force microscope including an optical lever system, comprising:

a scanning mechanism;
an optical lever system including a light source not moved by said scanning mechanism;
a cantilever moved by said scanning mechanism so that said cantilever may be scanned over a sample;
a position detector not moved by said scanning mechanism which receives a reflected light from said cantilever and detects an angular deflection of a free end of said cantilever;
and
said atomic force microscope further comprising an optical assembly including at least one steering lens to guide light emitted from said light source onto said cantilever to follow substantially a fixed position on said cantilever during movement of said scanning mechanism, wherein light reflected to said position detector does not pass through said steering lens.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

08/871,029Filed 9 Jun 1997 · continuation

Priority

17 Aug 1993

Granted

3 Jan 2012

Term ends

Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01Q 60/38
AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes: probes, their manufacture, or their related instrumentation, e.g. holders
B82Y 35/00
Methods or apparatus for measurement or analysis of nanostructures
G01Q 20/02
Monitoring the movement or position of the probe: by optical means
Y10S 977/87
With optical means: optical lever arm for reflecting light

Family

Application08/107,017Parent of this continuation · filed 17 Aug 1993

Application08/416,100Parent of this continuation · filed 4 Apr 1995

Application08/679,332Parent of this continuation · filed 11 Jul 1996

US 5,714,682 AParent of this continuation

US 5,560,244 AParent of this continuation

US 5,463,897 AParent of this continuation

US 8,087,288 B1This patent

From the US filing history. Foreign family members aren’t listed.

Scanning stylus atomic force microscope with cantilever tracking and optical access

Life of this patent

Scanning stylus atomic force microscope with cantilever tracking and optical access

Life of this patent

Abstract

Claims3