Semiconductor substrate, electronic device, optical device, and production methods therefor
AssigneesToyoda Gosei Co., Ltd., NGK Insulators, Ltd., Osaka University
InventorsNaoki Shibata, Koji Hirata, Shiro Yamazaki, Katsuhiro Imai, Makoto Iwai, Takatomo Sasaki, Yusuke Mori, Fumio Kawamura
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