Fine pattern mold
AssigneeHitachi Industrial Equipment Systems Co., Ltd.
InventorsMasahiko Ogino, Mitsuru Hasegawa, Kenya Ohashi, Akihiro Miyauchi, Hitoshi Suzuki, Toshio Haba, Haruo Akahoshi
Life of this patent
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Abstract
The fine pattern mold comprises: that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
Claims8
A fine pattern mold comprising;
- a roll comprising a main part and a heating mechanism;
- a buffer tube whose inner peripheral surface is in contact with an outer peripheral surface of said roll;
- and
- a stamper tube whose inner peripheral surface is in contact with an outer peripheral surface of said buffer tube and whose outer peripheral surface is provided with a fine concave/convex pattern thereon,
- wherein said buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of said stamper tube, and wherein a material of the main part of said roll is the same as that of said buffer tube.
Dependencies are inferred from the claim text.