Liquid flow controller and precision dispense apparatus and system
AssigneeEntegris, Inc.
InventorsMarc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
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AssigneeEntegris, Inc.
InventorsMarc Laverdiere, Robert F. McLoughlin, George Gonnella, Iraj Gashgaee, Jennifer Marrs
Estimating the term…
Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.
A fluid flow control apparatus, comprising:
A fluid flow control apparatus, comprising:
A fluid flow control apparatus, comprising:
A device comprising a set of computer readable instructions stored on a computer readable memory and executable by one or more processors, the set of computer readable instructions comprising instructions executable to:
A device comprising a set of computer readable instructions stored on a computer readable memory and executable by one or more processors, the set of computer readable instructions comprising instructions executable to:
Dependencies are inferred from the claim text.