Substrate processing recipe manager
AssigneeIntermolecular, Inc.
InventorsYoshiki Ashizawa, Heng-Cheng Pal, Patrick Ngatchou, Kurt Weiner, John Schmidt
Life of this patent
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Abstract
A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.
Claims26
A method to graphically create a recipe for processing a substrate, comprising:
- activating a recipe tool running on a client computer;
- the recipe tool displaying non-textual graphical images to a user through a graphical user interface, the non-textual graphical images representing a plurality of processing operations to be performed on the substrate by a substrate processing system;
- the user setting properties of the processing operations by manipulating the non-textual graphical images through the graphical user interface;
- and
- through the recipe tool, generating a recipe based on the properties of the processing operations set by the user in the manipulating step and synchronizing the plurality of processing operations based on the properties wherein the recipe is operable to be executed on a controller that operates the substrate processing system.
A method to graphically create a sequence-based recipe for processing a substrate, comprising:
- activating a recipe tool running on a client computer;
- the recipe tool displaying a non-textual graphical images to a user through a graphical user interface;
- the non-textual graphical images representing a chemical composition provided to a processing operation to be performed on the substrate by a substrate processing system;
- the user setting the chemical composition by manipulating the non-textual graphical images through the graphical user interface;
- and
- through the recipe tool, generating a sequence-based recipe based on the chemical composition set by the user in the manipulating step wherein the sequence-based recipe is operable to be executed on a controller that operates the substrate processing system.
A method of validating, comprising:
- storing a plurality of configuration schemas for a respective plurality of substrate processing tools on a server computer;
- receiving a recipe operable to be executed on a controller that operates the substrate processing system through a common interface for one of the substrate processing tools;
- validating the recipe will run on the substrate processing tool by comparing it to the stored configuration schema;
- wherein receiving the recipe comprises displaying non-textual graphical images to a user through a graphical user interface, the non-textual graphical images representing the plurality of processing operations to be performed on a substrate;
- the user setting properties of the plurality of processing operations by manipulating the non-textual graphical images through the graphical user interface;
- and generating the recipe based on the properties of the plurality of processing operations set by the user properties wherein the recipe is operable to be executed on a controller that operates the substrate processing system.
Dependencies are inferred from the claim text.