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US 8,080,993 B2Granted
Sensor module with mold encapsulation for applying a bias magnetic field
AssigneeInfineon Technologies AG
InventorsHorst Theuss, Helmut Wietschorke
Life of this patent
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Abstract
A method of manufacturing a sensor module includes providing a substrate comprising a magnetically sensitive sensor element. The sensor element and the substrate are encapsulated with at least one mold material that is configured to apply a bias magnetic field to the sensor element.
Claims20
A method of manufacturing a sensor module, comprising:
- providing a substrate comprising a magnetically sensitive sensor element;
- encapsulating the sensor element and the substrate with at least one mold material that is configured to apply a bias magnetic field to the sensor element;
- and
- applying a non-magnetic structure over the sensor element prior to the encapsulation, wherein the non-magnetic structure has one of a substantially conical shape and a substantially convex shape.
1 more element
A sensor module, comprising:
- a substrate comprising a magnetically sensitive element;
- a non-magnetic structure positioned over the magnetically sensitive element, wherein the non-magnetic structure has one of a substantially conical shape and a substantially convex shape;
- and
- at least one mold structure encapsulating the magnetically sensitive element and the substrate, the at least one mold structure configured to apply a bias magnetic field to the magnetically sensitive element.
1 more element
A sensor module, comprising:
- a semiconductor substrate comprising a magnetically sensitive element;
- a polymer structure positioned over the magnetically sensitive element, wherein the polymer structure has one of a substantially conical shape and a substantially convex shape;
- and
- a mold with magnetic particles encapsulating the polymer structure, the magnetically sensitive element, and the substrate, the mold configured to apply a bias magnetic field to the magnetically sensitive element.
1 more element
A method of manufacturing a sensor module, comprising:
- providing a substrate comprising a plurality of magnetically sensitive sensor elements;
- encapsulating the sensor elements and the substrate with at least one mold material that is configured to apply a bias magnetic field to the sensor elements;
- and
- applying a non-magnetic structure over each of the sensor elements prior to the encapsulation, wherein the at least one mold material encapsulates the plurality of sensor elements, the non-magnetic structures, and the substrate, wherein the non-magnetic structure has one of a substantially conical shape and a substantially convex shape.
1 more element
Dependencies are inferred from the claim text.