Composite field emission source
AssigneesTatung Co., Ltd., Tatung University
InventorsJian-Min Jeng, Jyi-Tsong Lo, Wen-Ching Shih, Wei-Lung Tasi
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Abstract
A method of fabricating a composite field emission source is provided. A first stage of film-forming process is performed by using RF magnetron sputtering, so as to form a nano structure film on a substrate, in which the nano structure film is a petal-like structure composed of a plurality of nano graphite walls. Afterward, a second stage of film-forming process is performed for increasing carbon accumulation amount on the nano structure film. Therefore, the composite field emission source with high strength and nano coral-like structures can be obtained, whereby improving the effect and life of electric field emission.
Claims4
A composite field emission source, being a nano structure film formed on a substrate, wherein the nano structure film comprises a petal-like structure composed of a plurality of nano graphite walls, and the nano structure film further comprising:
- a plurality of nano coral-like structures grown on the petal-like structure such that a height difference exists between the petal-like structure and the nano coral-like structures of the nano structure film at a micrometer level.
Dependencies are inferred from the claim text.