Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
AssigneeMicron Technology, Inc.
InventorDan B. Millward
Life of this patent
Estimating the term…
Abstract
Methods for fabricating a random graft PS-r-PEO copolymer and its use as a neutral wetting layer in the fabrication of sublithographic, nanoscale arrays of elements including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used as a template or mask to etch openings in an underlying material layer.
Claims34
A process for preparing a random graft copolymer, comprising:
- reacting a reaction mixture comprising p-chloromethylstyrene monomers to form a p-chloromethylstyrene homopolymer comprising chloromethyl moieties and repeating units derived from p-chloromethylstyrene;
- reacting the p-chloromethylstyrene homopolymer with one or more oligomers or polymers of poly(ethylene oxide) to form a graft copolymer comprising chloromethyl moieties, wherein the poly(ethylene oxide) has only one nucleophilic end;
- and,
- reacting the graft copolymer with an azide compound to displace chlorine atoms of the chloromethyl moieties to form azidomethyl moieties on the graft copolymer, wherein the azide compound selected from the consisting of sodium azide or R(N3)x, where R is a metal atom other than sodium, a hydrogen atom or an ammonium radical, and x is greater than zero.
A process for preparing a random graft copolymer, comprising:
- reacting a reaction mixture comprising p-chloromethylstyrene and styrene to form polymer chains that comprise chloromethyl moieties and repeating units derived from p-chloromethylstyrene and styrene, wherein the reaction mixture comprises p-chloromethylstyrene in a molecular amount greater than a molecular amount of the styrene;
- reacting the polymer chains with one or more oligomers or polymers of poly(ethylene oxide) to form a graft copolymer comprising chloromethyl moieties, wherein the poly(ethylene oxide) has only one nucleophilic end;
- and,
- reacting the graft copolymer with an azide compound to displace chlorine atoms of the chloromethyl moieties to form azidomethyl moieties on the graft copolymer.
A method of forming a random graft copolymer layer that is neutral wetting to both polystyrene and polyethylene oxide, comprising:
- applying a solution comprising an azido-functionalized random graft copolymer to a substrate to form the random graft copolymer layer, and
- crosslinking the random graft copolymer layer;
- wherein the random graft copolymer is formed by:
- reacting a reaction mixture comprising p-chloromethylstyrene monomers to form a p-chloromethylstyrene homopolymer comprising chloromethyl moieties and repeating units derived from p-chloromethylstyrene;
- reacting the p-chloromethylstyrene homopolymer with one or more oligomers or polymers of poly(ethylene oxide) to form a graft copolymer comprising chloromethyl moieties, wherein the poly(ethylene oxide) has only one nucleophilic end;
- and,
- reacting the graft copolymer with an azide compound to displace chlorine atoms of the chloromethyl moieties to form azidomethyl moieties on the graft copolymer, wherein the azide compound selected from the group consisting of sodium azide or R(N3)x, where R is a metal atom other than sodium, a hydrogen atom or an ammonium radical, and x is greater than zero.
A method of forming a random graft copolymer layer that is neutral wetting to both polystyrene and polyethylene oxide, comprising:
- applying a solution comprising an azido-functionalized random graft copolymer to a substrate to form the random graft copolymer layer;
- and
- crosslinking the random graft copolymer layer;
- wherein the random graft copolymer is formed by:
- reacting a reaction mixture comprising p-chloromethylstyrene and styrene to form polymer chains that comprise chloromethyl moieties and repeating units derived from p-chloromethylstyrene and styrene, wherein the reaction mixture comprises p-chloromethylstyrene in a molecular amount greater than a molecular amount of the styrene;
- reacting the polymer chains with one or more oligomers or polymers of poly(ethylene oxide) to form a graft copolymer comprising chloromethyl moieties, wherein the poly(ethylene oxide) has only one nucleophilic end;
- and,
- reacting the graft copolymer with an azide compound to displace chlorine atoms of the chloromethyl moieties to form azidomethyl moieties on the graft copolymer.
Dependencies are inferred from the claim text.