Autonomous adaptive system and method for improving semiconductor manufacturing quality

A method comprising:

• receiving data pertaining to quality of a product, wherein the data is further associated with a plurality of tools involved in fabricating the product;
• identifying, by backward chaining through the data, degradation in the quality of the product;
• and
• ranking at least one tool, in the plurality of tools, regarding an effect of the at least one tool on the quality of the product.

A computer-readable storage medium having computer executable instructions stored thereon that, in response to execution by a processor, cause the processor to perform operations for semiconductor processing, the operations comprising:

• receiving data pertaining to quality of a product, wherein the data is further associated with a plurality of tools involved in fabricating the product;
• and
• generating a knowledge facilitating an increase in product yield, wherein the generating further comprises:
• identifying, by backward chaining through the data, degradation in quality of the product;
• and
• ranking at least one tool, in the plurality of tools, regarding an effect of the at least one tool on the quality of the product.

A semiconductor tool system, comprising:

• a processor:
• a computer-readable storage medium communicatively coupled to the processor and storing computer executable components comprising:
• a learning system configured to:
• receive data that pertains to a set of tools utilized to fabricate a product;
• and
• backward chain, in the event of degradation in the quality of the product, through the data to rank at least one tool in the set of tools to generate knowledge to facilitate an increase in efficiency of the semiconductor tool system.