Dual-layer thermally tuned optical device
AssigneeOracle America, Inc.
InventorsGuoliang Li, John E. Cunningham, Ashok V. Krishnamoorthy, Ivan Shubin, Xuezhe Zheng
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Abstract
Embodiments of an optical device, an array of optical devices, and a technique for fabricating the optical device or the array are described. This optical device is implemented using two semiconductor layers (such as silicon), one of which includes a heater and the other includes a thermally tunable optical waveguide. Spatially separating these two functions in the optical device results in more efficient heat transfer between the heater and the optical waveguide, reduced heat transfer to the surroundings, and reduced optical losses in the optical waveguide relative to existing silicon-based optical devices.
Claims20
An optical device, comprising:
- a substrate;
- a first intermediate layer deposited on the substrate;
- a first semiconductor layer, deposited on the first intermediate layer, that includes a heater;
- a second intermediate layer deposited on the first semiconductor layer;
- and
- a second semiconductor layer, deposited on the second intermediate layer, that includes a thermally tunable optical waveguide.
An optical device, comprising:
- a substrate;
- a first intermediate layer deposited on the substrate;
- a first semiconductor layer, deposited on the first intermediate layer, that includes a thermally tunable optical waveguide;
- a second intermediate layer deposited on the first semiconductor layer;
- and
- a second semiconductor layer, deposited on the second intermediate layer, that includes a heater.
An array of optical devices, a given optical device comprising:
- a substrate;
- a first intermediate layer deposited on the substrate;
- a first semiconductor layer, deposited on the first intermediate layer, that includes a heater;
- a second intermediate layer deposited on the first semiconductor layer;
- and
- a second semiconductor layer, deposited on the second intermediate layer, that includes a thermally tunable optical waveguide.
Dependencies are inferred from the claim text.