Microphone and method for fabricating the same
AssigneePanasonic Corporation
InventorsMasanori Minamio, Yoshihiro Tomita, Koji Nomura
Life of this patent
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Abstract
A microphone includes: a substrate including a tone hole and having a top surface on which a substrate electrode is provided; a converter provided on the top surface of the substrate and including a main body having a back space, a diaphragm provided at the bottom of the back space of the main body, and a converter electrode provided on a region of a bottom surface of the main body facing the substrate electrode; and a bump connecting the substrate electrode and the converter electrode to each other. The diaphragm vibrates in response to sound entering from the tone hole. The converter converts sound into a signal.
Claims14
A microphone, comprising:
- a substrate including a tone hole and having a top surface on which a substrate electrode is provided;
- a converter for converting sound pressure into an electrical signal, the converter being mounted on the top surface of the substrate;
- a shield cap;
- and
- a bump, wherein the converter includes
- a main body having a back space,
- a diaphragm for receiving the sound pressure, the diaphragm being provided at the bottom of the back space of the main body, and
- a converter electrode provided on a region of a bottom surface of the main body facing the substrate electrode,
- the shield cap is in contact with top and side surfaces of the main body and covers the back space at a top of the back space, and
- the bump connects the substrate electrode and the converter electrode to each other.
A method for fabricating a microphone, the method comprising the steps of:
- (a) preparing a converter including
- a main body having a back space,
- a diaphragm provided at the bottom of the back space, and
- a converter electrode provided on a bottom surface of the main body;
- (b) mounting the converter on a substrate including a tone hole and having a top surface on which a substrate electrode is provided at a position corresponding to the converter electrode, and connecting the converter electrode and the substrate electrode to each other;
- and
- (c) providing, on the substrate, a shield cap which is in contact with top and side surfaces of the main body and covers the back space at a top of the back space, after the step (b).
Dependencies are inferred from the claim text.