Semiconductor laser device
AssigneeSanyo Electric Co., Ltd.
InventorsShingo Kameyama, Yoshiki Murayama
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Abstract
A semiconductor laser device capable of improving the reliability of the laser device is obtained. This semiconductor laser device (1000) includes a semiconductor element layer (20) having a light emitting layer (25), a first cavity facet (1) formed on an end portion on a light emitting side of a region of the semiconductor element layer including the light emitting layer, a first insulating film (40) in which a first nitride film (41), a first intermediate film including a first oxide film (42) and a second nitride film (43) are formed on the first cavity facet in this order from the side of the first cavity facet and a second insulating film (51), formed on the first insulating film, including a second oxide film (51).
Claims20
A semiconductor laser device comprising:
- a semiconductor element layer having a light emitting layer;
- a first cavity facet formed on an end portion on a light emitting side of a region of said semiconductor element layer including said light emitting layer;
- a first insulating film in which a first nitride film, a first intermediate film including at least one of a first oxide film and a first oxynitride film and a second nitride film are formed on said first cavity facet in this order from the side of said first cavity facet;
- and
- a second insulating film, formed on said first insulating film, including at least one of a second oxide film and a second oxynitride film, wherein
- the thickness t1 of said first nitride film, the thickness t2 of said first intermediate film and the thickness t3 of said second nitride film are set to be t1<λ/(4×n1), t2<λ/(4×n2) and t3<λ/(4×n3) respectively when the wavelength of a laser beam emitted by said light emitting layer is λ and the refractive index of said first nitride film, the average refractive index of said first intermediate film and the refractive index of said second nitride film are n1, n2 and n3 respectively.
Dependencies are inferred from the claim text.