Apparatus and a method for observing the surface of a sample
AssigneeKoninklijke Philips Electronics N.V.
InventorSipke Wadman
Life of this patent
Estimating the term…
Abstract
An apparatus for observing the appearance of the surface (2) of a sample (1), comprising a light source (11) for illuminating said surface (2) from a predetermined direction and means for observing the surface (2). The means of observing the surface (2) comprise a number of substantial flat mirrors (8) located in different directions with respect to said surface (2). The means furthermore comprise an optical system (6,14) for observing said flat mirrors (8). Each flat mirror (8) reflects an image of the surface (2) of the sample (1) to the image receiving part (6) of the optical system (6,14).
Claims10
An apparatus for observing the appearance of the surface (2) of a sample (1), comprising:
- a light source (11) for illuminating said surface (2) from a predetermined direction and
- means for observing the surface (2) comprising:
- a plurality of substantial flat mirrors (8) located in different directions with respect to said surface (2) and
- an optical system (6,14) for observing said flat mirrors (8), whereby each flat mirror (8) reflects an image of the surface (2) of the sample (1) to an image receiving part (6) of the optical system (6,14), and
- a spherical screen (17) located in front of the flat mirrors (8), wherein the screen (17) is provided with one or more openings (21) through which a light beam (12) can pass, and with an opening (22) through which the image receiving part (6) of the optical system (6,14) can be observed.
A method for observing the appearance of the surface (2) of a sample (1), comprising:
- illuminating said surface (2) from a predetermined direction;
- observing the surface (2) from another direction wherein the surface (2) is observed through a plurality of substantial flat mirrors (8) located in different directions with respect to said surface (2), wherein each flat mirror (8) reflects an image (23) of the surface (2) of the sample (1) to an image receiving part (6) of an optical system and a spherical screen (17) located in front of the flat mirrors (8), wherein the screen (17) is provided with one or more openings (21) through which a light beam (12) can pass, and with an opening (22) through which the image receiving part (6) of the optical system can be observed.
Dependencies are inferred from the claim text.