Piezoelectric vibrating pieces, and piezoelectric vibrators and oscillators comprising same
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorShingo Kawanishi
Life of this patent
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Abstract
Piezoelectric vibrating pieces are disclosed that include a base portion and first and second vibrating arms extending in a longitudinal direction from the base portion. Each vibrating arm has first and second main surfaces, a first groove on the first main surface, and a second groove on the second main surface. The grooves extend in the longitudinal. By adjusting the length and shapes of at least the first grooves relative to each other, the rigidity of the vibrating arms can be balanced and adverse effects of deformed regions between the vibrating arms caused by anomalous etching can be reduced.
Claims14
A piezoelectric vibrating piece, comprising:
- a base portion;
- a first vibrating arm and a second vibrating arm both extending in a designated longitudinal direction from the base portion, each vibrating arm having first and second main surfaces;
- and
- a respective first groove defined in at least one of the first and second main surfaces of the first vibrating arm, and a respective second groove defined in at least one of the first and second main surfaces of the second vibrating arm, each of the first and second grooves extending in the longitudinal direction;
- wherein the first groove and second groove have different respective lengths in the longitudinal direction, and
- the second groove extends further along the longitudinal direction toward the base portion than does the first groove.
A piezoelectric vibrating piece, comprising:
- a base portion;
- a first vibrating arm and a second vibrating arm extending in a designated longitudinal direction from the base portion;
- a first groove and a second groove defined in the first and second main surfaces, respectively, of the first vibrating arm, and a first groove and a second groove defined in the first and second main surfaces, respectively, of the second vibrating arm, each groove extending in the longitudinal direction;
- a deformity located on the base portion between the first and second vibrating arms, the deformity extending more toward the second vibrating arm than toward the first vibrating arm;
- and
- each of the first and second grooves comprising a respective proximal end, wherein the proximal end of the second groove has a volume thereof extending toward the base portion that is larger than a volume of the proximal end of the first groove.
Dependencies are inferred from the claim text.