Multiple element electrode cMUT devices and fabrication methods

A cMUT-based device configured as a forward or side looking ultrasonic array device that comprises a plurality of cMUT devices, the forward or side looking ultrasonic array device comprising:

• a plurality of cMUT devices formed in a plurality of array portions, the array portions being disposed at differing locations on a substrate that carries the cMUT devices;
• and
• at least some of the cMUT devices comprising a membrane that defines a cavity situated between the membrane and the substrate a first electrode disposed on the membrane and a second electrode disposed on the substrate, at least one of the first and second electrodes comprising a plurality of electrode elements, each having a cross-sectional width less than the membrane, the electrode elements being spaced apart from each other and forming part of different circuits and being operatively configured for displacement of the membrane for reception and transmission of ultrasonic waves, and
• wherein the electrode elements can receive and transmit ultrasonic wave energy independent of each other due to being part of different circuits.