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US 8,076,738 B2Granted
Integrally fabricated micromachine and logic elements
AssigneeInfineon Technologies AG
InventorsStefan Kolb, Reinhard Mahnkopf, Christian Pacha, Bernhard Winkler, Werner Weber
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Abstract
Embodiments of the invention are related to micromachine structures. In one embodiment, a micromachine structure comprises a first electrode, a second electrode, and a sensing element. The sensing element is mechanically movable and is disposed intermediate the first and second electrodes and adapted to oscillate between the first and second electrodes. Further, the sensing element comprises a FinFET structure having a height and a width, the height being greater than the width.
Claims12
A micromachine structure comprising:
- a first electrode;
- a second electrode disposed substantially parallel to, opposing and spaced apart in a first direction from the first electrode to define a gap therebetween;
- and
- a mechanically movable sensing element disposed in the gap defined by the first and second electrodes and adapted to oscillate between the first and second electrodes, the sensing element comprising a FinFET structure having a length, a height and a width, the length being greater than the height and the height being greater than the width, the width defined in the first direction.
1 more element
Dependencies are inferred from the claim text.