Magnesium-doped zinc oxide structures and methods
AssigneeMicron Technology, Inc.
InventorsKie Y. Ahn, Leonard Forbes
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Abstract
Methods of forming transparent conducting oxides and devices formed by these methods are shown. Monolayers that contain zinc and monolayers that contain magnesium are deposited onto a substrate and subsequently processed to form magnesium-doped zinc oxide. The resulting transparent conducing oxide includes properties such as an amorphous or nanocrystalline microstructure. Devices that include transparent conducing oxides formed with these methods have better step coverage over substrate topography and more robust film mechanical properties.
Claims15
An electrical device, comprising:
- a first device component;
- a second device component;
- and
- a magnesium-doped zinc oxide transparent conducting oxide structure electrically connecting the first and second device components, wherein the magnesium-doped zinc oxide transparent conducting oxide structure is formed by a method including:
- atomic layer depositing at least a first monolayer including zinc;
- atomic layer depositing at least a second monolayer including magnesium;
- and
- annealing the first and second monolayers to form a chemical mixture of the first and second monolayers.
An imaging device, comprising:
- a pixel array, including rows and columns;
- row and column drivers coupled to the rows and columns of the pixel array;
- a magnesium-doped zinc oxide transparent conducting oxide structure coupled to pixels in the pixel array, wherein the magnesium-doped zinc oxide transparent conducting oxide structure is formed by a method including:
- atomic layer depositing a first monolayer including zinc;
- atomic layer depositing a second monolayer including magnesium over the first monolayer;
- and
- annealing the first and second monolayers to form a chemical mixture of the first and second monolayers.
An electroluminescent device, comprising:
- a phosphor structure;
- a pair of electrodes on either side of the phosphor structure, wherein at least one of the electrodes includes a magnesium-doped zinc oxide transparent conducting oxide structure coupled to pixels in the pixel array, wherein the magnesium-doped zinc oxide transparent conducting oxide structure is formed by a method including:
- atomic layer depositing a plurality of first monolayers including zinc;
- atomic layer depositing a plurality of second monolayers including magnesium, wherein a number of first monolayers and second monolayers in a monolayer stack is chosen to reflect a desired chemistry of the magnesium-doped zinc oxide transparent conducting oxide structure;
- and
- annealing the first and second monolayers to form a chemical mixture of the first and second monolayers.
An organic light emitting diode, comprising:
- a polymer layer;
- a pair of electrodes on either side of the polymer layer, wherein at least one of the electrodes includes a magnesium-doped zinc oxide transparent conducting oxide structure coupled to pixels in the pixel array, wherein the magnesium-doped zinc oxide transparent conducting oxide structure is formed by a method including:
- atomic layer depositing a plurality of first monolayers including zinc;
- atomic layer depositing a plurality of second monolayers including magnesium, wherein a number of first monolayers and second monolayers in a monolayer stack is chosen to reflect a desired chemistry of the magnesium-doped zinc oxide transparent conducting oxide structure;
- and
- annealing the first and second monolayers to form a chemical mixture of the first and second monolayers.
Dependencies are inferred from the claim text.