Ferroelectric memory device and method of manufacturing the same

A ferroelectric memory device comprising:

• a substrate;
• a first insulating film formed above the substrate;
• a plug being disposed in an opening of the insulating film;
• a ferroelectric capacitor formed above the first insulating film, the ferroelectric capacitor including a lower electrode formed above the plug, a ferroelectric film formed on the lower electrode, and an upper electrode formed on the ferroelectric film;
• and
• a hydrogen barrier film formed on the ferroelectric capacitor, a first thickness of the hydrogen barrier film formed on the upper electrode being greater than a second thickness of the hydrogen barrier film formed on a side surface of the ferroelectric capacitor;
• the upper electrode having a first planar shape, the ferroelectric film having a second planar shape, the first planar shape being smaller than the second planar shape;
• and
• the hydrogen barrier film including a first hydrogen barrier film and a second hydrogen barrier film, the first hydrogen barrier film being formed on an upper surface of the upper electrode, a side surface of the upper electrode and an upper surface of the ferroelectric film, the second hydrogen barrier film being formed to directly contact an upper surface of the first hydrogen barrier film, directly contact a side surface of the first hydrogen barrier film, directly contact a side surface of the ferroelectric film and directly contact a side surface of the lower electrode.