CMOS image sensor and fabricating method thereof
AssigneeDongbu HiTek Co., Ltd.
InventorKeun-Hyuk Lim
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AssigneeDongbu HiTek Co., Ltd.
InventorKeun-Hyuk Lim
Estimating the term…
A CMOS image sensor and fabricating method thereof by which capacitance of a floating diffusion region (FD) can be increased. The CMOS image sensor can include an epitaxial layer formed over a semiconductor substrate; a gate electrode formed over the epitaxial layer; a gate metal formed over a floating diffusion region of the epitaxial layer; n+ type source and drain regions formed in the epitaxial layer; a gate spacer formed on both sidewalls of the gate electrode and both sidewalls of the gate metal; an insulating interlayer formed over the epitaxial layer including the gate electrode, the gate spacer and the gate metal layer, the insulating interlayer including a first contact hole extending through the insulating interlayer exposing the source region; a second contact hole extending through the insulating interlayer exposing the gate metal; a first contact plug formed in the first contact hole and connected to the source region; a second contact plug formed in the second contact hole and connected to the gate metal; and a metal line formed over the first contact plug and the second contact plug to electrically connect the source region to the gate metal.
An apparatus comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.