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AssigneeHitachi High-Technologies Corporation
InventorsMasahiro Koyama, Hironori Ogawa, Nobuo Shibata, Masaru Matsushima, Toshinori Kobayashi, Shuichi Nakagawa
Estimating the term…
A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.
A specimen stage apparatus comprising:
A specimen stage positioning control method in a specimen stage apparatus having a fixed base, a guide structure provided on said base, a movable table which moves along said guide structure, a specimen stage mechanism provided for said base and comprised of a braking structure for braking said movable table, a position detector for measuring positions of said movable table and a controller adapted to carry out positioning control of said movable table, wherein said controller comprises the steps of:
Dependencies are inferred from the claim text.