Front electrode for use in photovoltaic device and method of making same

A photovoltaic device including a front electrode structure, the front electrode structure comprising:

• a front substantially transparent glass substrate;
• a dielectric layer comprising titanium oxide;
• a dielectric layer comprising silicon oxynitride, wherein the layer comprising titanium oxide is located between the glass substrate and the layer comprising silicon oxynitride;
• a conductive layer comprising indium tin oxide, wherein the layer comprising silicon oxynitride is located between and contacting at least the layer comprising indium tin oxide and the layer comprising titanium oxide;
• a conductive layer comprising at least one of zinc oxide, tin oxide, and/or zinc aluminum oxide, wherein the conductive layer comprising indium tin oxide is located between and directly contacting the layer comprising silicon oxynitride and the conductive layer comprising at least one of zinc oxide, tin oxide, and/or zinc aluminum oxide;
• wherein the front electrode structure comprising said layer comprising titanium oxide, said layer comprising silicon oxynitride, said conductive layer comprising indium tin oxide, and said conductive layer comprising at least one of zinc oxide, tin oxide, and/or zinc aluminum oxide, is provided on an interior surface of the front glass substrate facing a semiconductor film of the photovoltaic device.