Method of fabricating an electromechanical device including at least one active element

A method of fabricating an electromechanical device including an active element in a mechanical layer having a functional structure that is obtained by selective chemical etching of a sacrificial layer, wherein the method comprises:

• a) making a monocrystalline first stop layer on a surface of a monocrystalline layer of a first substrate;
• b) growing a monocrystalline mechanical layer epitaxially on a surface of said first stop layer out of at least one material that is different from that of the stop layer, wherein said monocrystalline mechanical layer is non-strained;
• c) making a sacrificial layer on a surface of said mechanical layer out of a material that is suitable for being etched selectively relative to said mechanical layer;
• d) making a bonding layer on the sacrificial layer;
• e) bonding a second substrate on the bonding layer;
• and
• f) successively eliminating the first substrate and said stop layer to reveal said surface of the mechanical layer opposite from the sacrificial layer, said stop layer acting as a stop layer for the elimination of the first substrate.