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US 8,075,947 B2Granted
Optical thin-film-forming methods and optical elements formed using same
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorsShinya Kikegawa, Toshimasa Nishi, Motoo Takada
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Abstract
Optical thin-film-forming methods are disclosed that form optical thin film on a base plate arranged in a vacuum chamber. An exemplary method includes the steps of retaining the base plates on a plurality of retaining frames of a base-plate retainer, heating the base plate, and emitting a deposition material from a deposition source. The retaining frames are configured to make the entire base plate uniformly heated.
Claims8
A method for forming an optical thin film on base plates, the method comprising the steps of:
- in a vacuum chamber, mounting the base plates on a plurality of retaining frames on a retainer holder;
- controlling a heat distribution in the base plates from central areas to surrounding regions thereof;
- and
- while the base plates are mounted to the retainer hold and while controlling the heat distribution so as to be substantially uniform from the central areas to the surrounding regions of the base plates, emitting a deposition material from a deposition source and depositing the deposition material on the base plates.
1 more element
Dependencies are inferred from the claim text.