Film forming method and producing method for electron source substrate
AssigneeCanon Kabushiki Kaisha
InventorSeiji Mishima
Life of this patent
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Abstract
In case of forming films in plural positions with an ink jet head having plural nozzles, to provide a method of efficiently correcting an aberration in the liquid droplet applying position resulting for example from a distortion of a substrate, thereby producing an electron source with a high production yield. Positions of device electrodes 2, 3 on the electron source substrate 1 are detected by fetching in advance a surface image of the substrate 1, then a position of an electroconductive film 4 is calculated as a liquid droplet applying position, and an inclination angle θ of the ink jet head 11 is so regulated that a pitch of the nozzles 12 matches a pitch d of the obtained liquid droplet applying positions.
Claims3
A film forming method for forming films in plural positions on a substrate by applying liquid including a film material locally to the plural liquid applying positions on the substrate from an ink jet head having plural nozzles arranged linearly at a desired interval, wherein the plural liquid applying positions are arranged in a matrix form and an average pitch of the plural liquid applying positions in one row is different from that in another row, the method comprising:
- a step of detecting positional information of the plural liquid applying positions on the substrate;
- a step of calculating an average pitch of the plural liquid applying positions in each row, based on the positional information detected in the detecting step;
- a step of adjusting a rotation angle of the ink jet head so that a pitch of the nozzles in projection to a row direction substantially coincides with the average pitch of the plural liquid applying positions in each row, and
- a step of applying liquid to the liquid applying positions by scanning the ink jet head in a column direction in combination with rotating the ink jet head about an axis normal to the substrate by the rotation angle adjusted in the adjusting step.
Dependencies are inferred from the claim text.