Slurry for slicing silicon ingot and method for slicing silicon ingot using the same
AssigneeMitsubishi Electric Corporation
InventorsTakafumi Kawasaki, Seiichi Mimura, Hirokazu Nishida, Yasuhiro Yoshida
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Abstract
The invention is a slurry for slicing a silicon ingot, containing a basic material, such as an alkali metal hydroxide, abrasive powder and water, in which the slurry contains the basic material in an amount of from 2 to 6% by mass and glycerin in an amount of from 25 to 55% by mass, based on a total mass of components of the slurry excluding the abrasive powder.
Claims11
A slurry for slicing a silicon ingot, comprising abrasive powder, a basic material and water, wherein the slurry comprises the basic material in an amount of from 2 to 6% by mass and glycerin in an amount of from 25 to 55% by mass, based on a total mass of components of the slurry excluding the abrasive powder,
- wherein one or a combination of two or more of silicon carbide, cerium oxide, diamond, boron nitride, aluminum oxide, zirconium oxide and silicon dioxide is used as the abrasive powder.
A slurry for slicing a silicon ingot, comprising abrasive powder, a basic material and water, wherein the slurry comprises the basic material in an amount of from 2 to 6% by mass, glycerin in an amount of from 25 to 55% by mass, and a nonionic polymer surfactant in an amount of from 0.2 to 0.9% by mass, based on a total mass of components of the slurry excluding the abrasive powder.
A method for slicing a silicon ingot with a slurry comprising abrasive powder and a basic material, wherein the slurry comprises the basic material in an amount of from 2 to 6% by mass and glycerin in an amount of from 25 to 55% by mass, based on a total mass of components of the slurry excluding the abrasive powder,
- wherein one or a combination of two or more of silicon carbide, cerium oxide, diamond, boron nitride, aluminum oxide, zirconium oxide and silicon dioxide is used as the abrasive powder.
A method for slicing a silicon ingot with a slurry comprising abrasive powder and a basic material, wherein the slurry comprises the basic material in an amount of from 2 to 6% by mass, glycerin in an amount of from 25 to 55% by mass, and a nonionic polymer surfactant in an amount of from 0.2 to 0.6% by mass, based on a total mass of components of the slurry excluding the abrasive powder.
Dependencies are inferred from the claim text.