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US 8,072,705 B1Granted
Method and system for providing a magnetic writer using a BARC
AssigneeWestern Digital (Fremont), LLC
InventorsYizhong Wang, Hong Zhang, Hai Sun, Hongping Yuan, Winnie Yu
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Abstract
A method and system for providing a magnetic writer are described. The method and system include providing a bottom antireflective coating (BARC) on a portion of the magnetic writer. The BARC has a low reflectivity. The method and system also include providing a barrier layer on at least a portion of the BAR and providing a mask on at least a portion of the barrier layer. The barrier layer isolates the BARC from the mask.
Claims21
A method for providing a magnetic writer comprising;
- providing a bottom antireflective coating (BARC) on a portion of the magnetic writer having a reflectivity, the BARC having a low reflectivity, the low reflectivity being less than the reflectivity;
- providing a barrier layer residing on at least a portion of the BARC, the barrier layer chemically isolating the at least the portion of the BARC from at least one structure above the barrier layer and from exposure to an ambient;
- and
- providing a structure on at least a portion of the barrier layer, wherein the barrier layer has a thickness of not more than forty Angstroms.
1 more element
A magnetic writer comprising;
- a bottom antireflective coating (BARC) on a portion of the magnetic writer having a reflectivity, the BARC having a low reflectivity, the low reflectivity being less than the reflectivity;
- a barrier layer residing on at least a portion of the BARC, the barrier layer chemically isolating the at least the portion of the BARC from at least one structure above the barrier layer and from exposure to an ambient;
- and
- a structure on at least a portion of the barrier layer;
- wherein the barrier layer has a thickness of not more than forty Angstroms.
2 more elements
A magnetic writer comprising;
- a bottom antireflective coating (BARC) on a portion of the magnetic writer, the BARC having a low reflectivity;
- a barrier layer residing on at least a portion of the BARC, the barrier layer chemically isolating the at least the portion of the BARC from at least one structure above the barrier layer and from exposure to an ambient;
- and
- a structure on at least a portion of the barrier layer;
- wherein the BARC further includes silicon nitride.
2 more elements
Dependencies are inferred from the claim text.