Thermal insulation stamper and production method of same
AssigneeRicoh Company, Ltd.
InventorsKazuhiro Kotaka, Yuzuru Kudoh
Life of this patent
Estimating the term…
Abstract
A thermal insulation stamper includes a first metal layer, a heat insulating layer, an intermediate layer, a conductive coating, and a second metal layer. The first metal layer has a fine pattern on an exposed surface. The heat insulating layer is formed of a heat-resistant resin and overlies the first metal layer. The heat-resistant resin contains oxygen. The intermediate layer overlies the heat insulating layer. The conductive coating overlies the intermediate metal layer. The second metal layer overlies the conductive coating. A region with a high concentration of oxygen is formed in the vicinity of an interface between the heat insulating layer and the intermediate layer. A method for producing such a thermal insulation stamper is also disclosed.
Claims4
A thermal insulation stamper, comprising:
- a first metal layer having a fine pattern on an exposed surface;
- a heat insulating layer formed of a heat-resistant resin and overlying the first metal layer, the heat-resistant resin containing oxygen;
- an intermediate layer formed of an oxygen-active metal and overlying the heat insulating layer;
- a conductive coating overlying a top surface of the intermediate layer;
- and
- a second metal layer overlying the conductive coating,
- wherein the intermediate layer is a vapor deposited layer that is deposited through plasma treatment and which during deposition activates oxygen contained in the heat insulating layer to form an interfacial region between the heat insulating layer and the intermediate layer where the oxygen establishes a chemical bond with the oxygen-active metal, and
- wherein a concentration of oxygen decreases from the top surface of the intermediate layer toward the heat insulating layer, and increases within the interfacial region from the intermediate layer to the heat insulating layer.
Dependencies are inferred from the claim text.