Electrically conductive structure on a semiconductor substrate formed from printing
AssigneeUltratech, Inc.
InventorsArthur W. Zafiropoulo, Andrew M. Hawryluk
Life of this patent
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Abstract
Provided are methods for forming an electrically conductive structure of a desired three-dimensional shape on a substantially planar surface of a substrate, e.g., a semiconductor wafer. Typically, the particulate matter is deposited in a layer-by-layer manner and adhered to selected regions on the substrate surface. The particulate matter may be deposited to produce a mold for forming the structure and/or to produce the structure itself. A three-dimensional printer with associated electronic data may be used without the need of a lithographic mask or reticle.
Claims34
A method for forming an electrically conductive structure of a desired three-dimensional shape on a substantially planar surface of a semiconductor substrate, comprising:
- (a) depositing a loose layer of a selected generally uniform thickness of a selected powder on substantially the entire substantially planar surface of the semiconductor substrate;
- (b) scanning a particulate matter dispenser over the powder layer and depositing binder droplets of particulate matter therefrom on the powder layer at selected locations relative to locations of the substrate surface wherein the powder at such locations becomes bonded to the substrate surface at those locations where said electrically conductive structure is not to be formed to produce a mold having at least one cavity therein defined by an interior surface of said bonded powder that extends from a substantially planar base opening abutting the substrate surface and exhibits the desired three-dimensional shape where the powder in said at least one cavity was not bonded to the substrate surface;
- (c) removing the loose powder from said at least one cavity to clear the mold;
- (d) filling the mold by electroplating an electrically conductive material onto the semiconductor substrate surface within said at least one cavity to form an electrically conductive structure of the desired three-dimensional shape;
- and
- (e) removing the mold from the substrate surface without altering the shape of or displacing the conductive structure from the substrate surface.
A method for forming a free-standing, electrically conductive structure of a desired three-dimensional shape on a substantially planar surface of a semiconductor substrate, comprising:
- (a) providing a three-dimensional printer with electronic data relating a mold having at least one cavity therein, wherein the printer is constructed to operate without need of a lithographic mask or reticle and the at least one cavity to be formed is defined by an interior surface that extends from a substantially planar base opening and exhibits the desired three-dimensional shape;
- (b) using the printer to produce the mold on the substrate surface so the base opening of the at least one cavity abuts the substrate surface;
- (c) filling the mold by electroplating an electrically conductive material onto the substrate surface to form an electrically conductive structure of the desired three-dimensional shape;
- and
- (d) removing the mold from the substrate surface without removing the electrically conductive structure from the substrate surface or altering the shape of the electrically conductive structure.
A method for forming an electrically conductive structure of a desired three-dimensional shape on a substantially planar surface of a semiconductor substrate, comprising:
- (a) depositing a loose layer of a selected thickness of a selected powder on to locations of the substantially planar surface of the semiconductor substrate other than where said electrically conductive structure is to be formed;
- (b) scanning a particulate matter dispenser over locations having the powder layer and depositing binder droplets of particulate matter therefrom om the powder layer bonding the powder to the substrate surface to produce a mold having at least one cavity therein defined by an interior surface of said bonded powder that extends from a substantially planar base opening abutting the substrate surface and exhibits the desired three-dimensional shape, wherein the mold is produced without using a subtractive step that removes unbonded loose powder from the surface of the substrate;
- (c) filling the mold by electroplating an electrically conductive material onto the substrate surface to form an electrically conductive structure of the desired three-dimensional shape;
- and
- (d) removing the mold from the substrate surface without the shape of or displacing the electrically conductive structure from substrate surface.
A method for forming an electrically conductive structure of a desired three-dimensional shape on a substantially planar surface of a semiconductor substrate, comprising:
- (a) depositing a loose layer of a selected thickness of a selected metallic powder on the substantially planar surface of the semiconductor substrate;
- (b) scanning a particulate matter dispenser over the powder layer;
- (c) while performing step (b), depositing electrically conductive binder droplets from the dispenser on the powder layer relative to selected locations of the surface of the semiconductor substrate wherein the powder at such locations becomes a metal bonded to the semiconductor substrate;
- and
- (d) remove the loose powder not bonded to the substrate surface to produce the electrically conductive structure of the desired dimensional shape, wherein the electrically conductive structure exhibits a feature resolution finer than about 50 micrometers.
A method for forming a free-standing electrically conductive structure of a desired three-dimensional shape on a substantially planar surface of the semiconductor substrate, the method being performed using a three-dimensional printer with associated electronic data relating to a mould having at least one cavity therein, wherein the printer is constructed to operate without the need of a lithographic mask or reticle, the method comprising:
- (a) using the printer to produce the mold on the substrate surface including the at least one cavity formed therein, the at least one cavity being defined by an interior surface that extends from a substantially planar base opening and exhibits the desired three-dimensional shape and being formed so that the base opening of the at least one cavity abuts the substrate surface;
- (b) filling the mold by electroplating an electrically conductive material onto the substrate surface to form an electrically conductive structure of the desired three- dimensional shape;
- and
- (c) removing the mold from the substrate surface without removing the electrically conductive structure from the substrate surface or altering the shape of the electrically conductive structure.
Dependencies are inferred from the claim text.