Blind motorized coupling arrangements for coupling UV light source subsystem and scanner subsystem in a UV lithography system and methods therefor

A UV lithography system, comprising:

• a light source subsystem comprising a light source output tube;
• a scanner subsystem;
• and
• a coupling arrangement for coupling said light source subsystem with said scanner subsystem, comprising:
• a source flange having a plurality of radially outwardly projecting eared flanges disposed around a periphery of said source flange and coupled to one of said light source output tube and said scanner subsystem,
• a collar coupled with the other of said light source output tube and said scanner subsystem, said collar having a plurality of radially inwardly projecting tangs disposed around a periphery of said collar such that inter-tang spacings accommodate insertion of said plurality of eared flanges, wherein at least one of said source flange and said collar is rotatable to permit said plurality of ramped eared flanges to cam against said plurality of tangs, thereby coupling said light source subsystem to said scanner subsystem, and
• a lead-in stub coupled with said other of said light source output tube and said scanner subsystem, said lead-in stub configured to fit in a recess disposed within an end of said one of said light source output tube and said scanner subsystem to facilitate blind-mate self-centering when said light source subsystem is brought together with said scanner subsystem, wherein said is disposed through a center of said collar and axially protrudes beyond a plane formed by said plurality of tangs.