Device for controlling processing system, method for controlling processing system and computer-readable storage medium stored processing program

A control device for a processing system, wherein the processing system includes a plurality of processing chambers in which a predetermined process is performed on an object to be processed, a storage port that stores objects to be processed, and a transfer mechanism that transfers each object to be processed to a predetermined transfer destination between the plurality of processing chambers and the storage port, wherein the control device comprises:

• a transfer destination determining portion that determines a first transfer destination of each object to be processed that is stored in the storage port such that each object to be processed is sequentially transferred to a processing chamber that is operating normally among the plurality of processing chambers;
• an evacuation portion that, when transfer of an object to be processed to one of the plurality of processing chambers is inhibited, temporarily evacuates the object to be processed that has been determined to be transferred to the processing chamber to which the transfer is inhibited and that has not yet been transferred to the processing chamber to which the transfer is inhibited;
• and
• a transfer inhibition portion that, when the transfer destination determining portion determines a second transfer destination for the evacuated object to be processed, and upon determination that a process that is performed immediately before processing the evacuated object to be processed in the second transfer destination satisfies a predetermined condition, inhibits the transfer of the evacuated object to be processed to the second transfer destination,
• wherein, the predetermined condition to inhibit the transfer of the evacuated object to be processed includes a case when the inside of the processing chamber that is the first transfer destination has not been adjusted to a stable condition by the process performed immediately before processing the evacuated object to be processed, and
• wherein, the predetermined condition to inhibit the transfer of the evacuated object to be processed includes a case when the process immediately before processing the evacuated object to be processed is not a seasoning process when the inside of the processing chamber that is the first transfer destination after cleaning should be seasoned.

A control device for a processing system, wherein the processing system includes a plurality of processing chambers in which a predetermined process is performed on an object to be processed, a storage port that stores objects to be processed, and a transfer mechanism to transfer each object to be processed to a predetermined transfer destination between the plurality of processing chambers and the storage port, wherein the control device comprises:

• a transfer destination determining portion that determines a first transfer destination of each object to be processed that is stored in the storage port such that each object to be processed is sequentially transferred to a processing chamber that is operating normally among the plurality of processing chambers;
• an evacuation portion that, when transfer of an object to be processed to one of the plurality of processing chambers is inhibited, temporarily evacuates the object to be processed that has been determined to be transferred to the processing chamber to which the transfer is inhibited and that has not yet been transferred to the processing chamber to which the transfer is inhibited;
• and
• a transfer inhibition portion that, when the transfer destination determining portion determines a second transfer destination for the evacuated object to be processed, and upon determination that a process that is performed immediately before processing the evacuated object to be processed in the second transfer destination satisfies a predetermined condition, inhibits the transfer of the evacuated object to be processed to the second transfer destination,
• wherein, the predetermined condition to inhibit the transfer of the evacuated object to be processed includes a case when the inside of the processing chamber that is the first transfer destination has been adjusted to receive a lot next to a lot including the evacuated object to be processed by the process performed immediately before processing the evacuated object to be processed.

A control method for a processing system, wherein the processing system includes a plurality of processing chambers in which a predetermined process is performed on an object to be processed, a storage port that stores objects to be processed, and a transfer mechanism that transfers each object to be processed to a predetermined transfer destination among the plurality of processing chambers and the storage port, the control method comprising the steps of:

• determining a first transfer destination of each object to be processed that is stored in the storage port such that each object to be processed is sequentially transferred to a processing chamber that is operating normally among the plurality of processing chambers;
• temporarily evacuating, when transfer of an object to be processed to one of the plurality of processing chambers is inhibited, the object to be processed that it has been determined is to be transferred to the processing chamber to which the transfer is inhibited and that has not yet been transferred to the processing chamber to which the transfer is inhibited;
• determining a second transfer destination for the evacuated object to be processed;
• and
• inhibiting the transfer of the evacuated object to be processed to the second transfer destination, if a process that is performed immediately before processing the evacuated object to be processed in the second transfer destination satisfies a predetermined condition,
• wherein, the predetermined condition to inhibit the transfer of the evacuated object to be processed includes a case when the inside of the processing chamber that is the transfer destination has not been adjusted to a stable condition by the process performed immediately before processing the evacuated object to be processed, and
• wherein, the predetermined condition to inhibit the transfer of the evacuated object to be processed includes a case when the process immediately before processing the evacuated object to be processed is not a cleaning process when the inside of the processing chamber that is the first transfer destination should be cleaned.

A non-transitory computer readable storage medium having instructions stored therein, which when executed by a processor in a control device for a processing system causes the control device to execute a method for controlling the processing system, wherein the processing system includes a plurality of processing chambers in which a predetermined process is performed on an object to be processed, a storage port that stores objects to be processed, and a transfer mechanism that transfers each object to be processed to a predetermined transfer destination among the plurality of processing chambers and the storage port, the method comprising:

• determining a first transfer destination of each object to be processed that is stored in the storage port such that each object to be processed is sequentially transferred to a processing chamber that is operating normally among the plurality of processing chambers;
• temporarily evacuating, when transfer of an object to be processed to one of the plurality of processing chambers is inhibited, the object to be processed that has been determined to be transferred to the processing chamber to which the transfer is inhibited and that has not yet been transferred to the processing chamber to which the transfer is inhibited;
• determining a second transfer destination for the evacuated object to be processed;
• and
• inhibiting the transfer of the evacuated object to be processed to the second transfer destination, if a process that is performed immediately before processing the evacuated object to be processed in the second transfer destination satisfies a predetermined condition
• wherein, the predetermined condition to inhibit the transfer of the evacuated object to be processed includes a case when the inside of the processing chamber that is the transfer destination has not been adjusted to a stable condition by the process performed immediately before processing the evacuated object to be processed, and
• wherein, the predetermined condition to inhibit the transfer of the evacuated object to be processed includes a case when the process immediately before processing the evacuated object to be processed is not a cleaning process when the inside of the processing chamber that is the first transfer destination should be cleaned.