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US 8,045,834 B2Granted
Silica-on-silicon waveguides and related fabrication methods
AssigneeCalifornia Institute of Technology
InventorsOskar Painter, Kerry Vahala
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Abstract
True time delay silica waveguides and related fabrication methods are disclosed. Also disclosed are true time delay silica waveguides comprising wedged silica structures.
Claims10
A silica waveguide, comprising:
- a first silica waveguide structure;
- a second silica waveguide structure;
- a silica separation strip separating the first silica waveguide structure from the second silica waveguide structure;
- and
- a silicon pillar supporting the first silica waveguide structure, the second silica waveguide structure, and the silica separation strip,
- wherein the first silica waveguide structure and the second silica waveguide structure extend along a curved path, and
- wherein the curved path is a spiral path.
4 more elements
A silica waveguide having a substantially curved shape, comprising:
- a first curved waveguide;
- a second curved waveguide;
- and
- a transition section connecting the first curved waveguide with the second curved waveguide,
- wherein the first curved waveguide, second curved waveguide, and transition section are wedged silica structures forming a non-resonant silica waveguide.
2 more elements
Dependencies are inferred from the claim text.