Method and device for identifying material boundaries of a test object
AssigneeCarl Zeiss Industrielle Messtechnik GmbH
InventorsHubert Lettenbauer, Andreas Lotze, Steffen Kunzmann
Life of this patent
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Abstract
A method and a device determine material interfaces in a test object. The novel method generates three-dimensional image data of the test object or uses already existing three-dimensional image data of the test object. Image values of the image data are, or were, obtained by invasive radiation. An evaluation line for evaluating the image data relative to the test object is determined, a location of a material interface of the test object is determined by evaluating the image data of image values along the evaluation line so that the value of the first partial derivative of the image values in the direction of the evaluation line has a local maximum at the location of the material interface.
Claims13
A method of identifying material boundaries of a test object, the method which comprises:
- acquiring three-dimensional image data of the test object, wherein image values of the image data are obtained or have been obtained using invasive radiation;
- defining an evaluation line for evaluating the image data in relation to the test object, the evaluation line extending through a point on an expected boundary surface of a material of the test object and having a direction, at the point, perpendicular to the expected boundary surface, wherein the point and the expected boundary surface are identified from information regarding a desired condition of the test object;
- and
- evaluating the image values lying along the evaluation line to thereby determine a location of a material boundary in the test object, such that an amount of a first partial derivative of the image values in a direction of the evaluation line has a local maximum at the location of the material boundary.
A device for identifying material boundaries of a test object, the device comprising:
- an interface for receiving three-dimensional image data of the test object, wherein image values of the image data have been obtained by way of invasive radiation;
- a parametrization device for defining an evaluation line in relation to the test object, said the parametrization device defining an evaluation line extending through a point on an expected boundary surface of the material, and having a direction at the point perpendicular to an expected boundary surface, said parametrization device identifying the point and the expected boundary surface from information on a desired condition of the test object;
- and
- an evaluation device connected to said interface and to said parametrization device, said evaluation device being configured to identify a location of a material boundary of the test object by evaluating image values lying along the evaluation line, so that an amount of a first partial derivative of the image values in the direction of the evaluation line has a local maximum at the location of the material boundary.
Dependencies are inferred from the claim text.