Method of controlling movements of a position of a microscanner
AssigneeInternational Business Machines Corporation
InventorsAbu Sebastian, Angeliki Pantazi, Charalampos Pozidis, Evangelos S. Eleftheriou, Reza Moheimani
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Abstract
The invention relates to a method of controlling movements of a positioner of a micro-scanner, the method comprising: determining the vibration resonance frequency ranges of the positioner, and performing a main scan by a controlled movement of the positioner.
Claims29
A method of controlling at least a movement of a positioner of a scanner, the method being performed in a controlled substantially vibration free environment, the method comprising:
- determining a first and second vibration resonance frequency range of the positioner, wherein the first and second ranges comprise a first and a second vibration resonance of the positioner, respectively;
- and
- performing a main scan by a movement of the positioner in a first and a second scan direction, wherein the spatial positioning of the positioner in the first and second scan direction is controlled by a first and second feedback loop, respectively, wherein the controlling by the first and second feedback loop is essentially performed in the first and second resonance frequency range, respectively.
A method for controlling at least a movement of a positioner of a scanner in a substantially vibration free environment, the method comprising:
- determining a first vibrational resonance frequency range of the positioner, wherein the first range comprises a first vibrational resonance of the positioner;
- determining a second resonance frequency range of the positioner, wherein the second range comprises a second vibrational resonance of the positioner;
- and
- controlling a main scan, wherein the main scan is a movement of the positioner in a first and a second scan direction, the main scan is controlled utilizing a first and a second feedback loop, wherein the first feedback loop is adapted to control the spatial positioning of the positioner in the first scan direction essentially in the first frequency range, wherein the spatial positioning of the positioner in the second scan direction is controlled by the second feedback loop, wherein the second feedback loop is adapted to control the spatial positioning of the positioner in the second scan direction essentially in the second frequency range.
A computer-readable device comprising computer executable instructions for performing the method steps:
- determining a first and second vibration resonance frequency range of a positioner, wherein the first and second ranges comprise a first and a second vibration resonance of the positioner, respectively;
- and
- performing a main scan by a movement of the positioner in a first and a second scan direction, wherein the spatial positioning of the positioner in the first and second scan direction is controlled by a first and second feedback loop, respectively, wherein the controlling by the first and second feedback loop is essentially performed in the first and second resonance frequency range, respectively.
Dependencies are inferred from the claim text.