Structure body electrically connected via semiconductor material layer
AssigneesSilicon Quest Kabushiki-Kaisha, Olympus Corporation
InventorsHirotoshi Ichikawa, Yoshihiro Maeda, Fusao Ishii
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Abstract
The present invention discloses an image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements further comprises an electrode having a structural body comprising: a first electrically conductive layer; a second electrically conductive layer; and a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer and the semiconductor layer further comprises a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer.
Claims22
An image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements comprising:
- an electrode having a structure body includes a first electrically conductive layer and a second electrically conductive layer;
- the structure body further includes a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer wherein the semiconductor layer further comprising a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer;
- and
- at least one of the first and second conductive layer is a metal layer covered by the semiconductor layer.
An image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements comprising:
- an electrode having a structure body includes a first electrically conductive layer and a second electrically conductive layer;
- the structure body further includes a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer wherein the semiconductor layer further comprising a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer;
- and
- at least one of the first electric conductive layer and second electric conductive layer is composed with a material containing aluminum, and
- the semiconductor layer further comprises an annealed semiconductor layer annealed by using a gas containing hydrogen.
An image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements comprising:
- an electrode having a structure body includes a first electrically conductive layer and a second electrically conductive layer;
- the structure body further includes a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer wherein the semiconductor layer further comprising a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer;
- and
- the doped conductive area of the semiconductor layer further comprises multiple sub-doped conductive areas on said semiconductor layer.
An image display system implemented with a spatial light modulator (SLM) having a plurality of pixel elements wherein each of the pixel elements comprising:
- an electrode having a structure body includes a first electrically conductive layer and a second electrically conductive layer;
- the structure body further includes a semiconductor layer disposed adjacently to the first electric conductive layer and second electric conductive layer wherein the semiconductor layer further comprising a doped conductive area for electrically connecting the first electric conductive layer and second electric conductive layer;
- an electric conductive movable body, and
- a second semiconductor layer disposed adjacently to the first electric conductive layer and the conductive movable body and the second semiconductor layer further comprises a second doped conductive area for electrically connecting the first electric conductive layer and the conductive movable body.
An image display system implemented with a mirror device comprising:
- a plurality of micromirrors each supported on a deflectable hinge electrically connected to the micromirror;
- a hinge electrode for applying a voltage to the hinge and the micromirror electrically connected to the hinge;
- a drive electrode for applying a second voltage independent from the voltage applied to of the hinge electrode;
- a drive circuit for controlling the hinge electrode and the drive electrode;
- and
- a semiconductor layer comprising a doped conductive area for electrically connecting the hinge and hinge electrode, hinge electrode and drive circuit, or the drive electrode and drive circuit.
Dependencies are inferred from the claim text.