Inspection system and method with multi-image phase shift analysis

A phase shifting projector, comprising:

• a light source configured to generate light;
• a grating in a path of the generated light and configured to produce a grating image after the light passes through the grating;
• and
• a phase shifting unit configured to form and reflect a plurality of phase shifted patterns of the grating image onto an object surface to form a plurality of projected phase shifted patterns.

An inspection method, comprising:

• projecting light from a light source through a grating to produce a grating image;
• guiding the grating image through a phase shifting unit to form and reflect a plurality of phase shifted patterns of the grating image onto an area having a linear dimension of less than about ten millimeters, of an object surface to form a plurality of projected phase shifted patterns at an angle relative to the surface normal;
• obtaining a plurality of image data of the projected phase shifted patterns from the object surface, as viewed from an angle differing from the angle of projection of the phase shifted patterns onto the object surface;
• and
• reconstructing the object surface from the image data with a resolution of less than about ten microns.