Spectral image processing method, spectral image processing program, and spectral imaging system
AssigneeNikon Corporation
InventorsMasafumi Mimura, Hisashi Okugawa
Life of this patent
Estimating the term…
Abstract
A spectral image processing system and method of performing robust unmixing on measurement noise. Based on an observed spectral image acquired from a specimen and emission spectral data of each of plural materials contained in the specimen, a contribution of each of the plural materials to the observed spectral image is unmixed by a process, including an evaluating step of evaluating reliability of each component of the observed spectral image based on a predicted spectral image of the observed spectral image, and a reflecting step of reflecting a result of the evaluation in a content of the unmixing.
Claims14
A spectral image processing method of, based on an observed spectral image acquired from a specimen and emission spectral data of each of a plurality of materials contained in the specimen, unmixing a contribution of each of said plurality of materials to said observed spectral image, comprising:
- an evaluating step of evaluating reliability of each component of said observed spectral image based on a predicted spectral image generated from said observed spectral image by processing image data of said observed spectral image;
- a reflecting step of reflecting a result of said evaluation in a content of said unmixing;
- and
- a displaying step of displaying a result of said unmixing.
A non-transitory computer-readable storage medium storing a spectral image processing program which causes a computer to execute a spectral image processing method in which a contribution of each of a plurality of materials of a specimen to an observed spectral image acquired from the specimen are unmixed, the spectral image processing method comprising:
- an evaluating step of evaluating reliability of each component of said observed spectral image based on a predicted spectral image generated from said observed spectral image by processing image data of said observed spectral image;
- and
- a reflecting step of reflecting a result of said evaluation in a content of said unmixing.
A spectral imaging system, comprising:
- a spectral imaging unit which acquires an observed spectral image from a specimen;
- and
- a spectral image processing unit which imports said observed spectral image from said spectral imaging unit and performs a spectral image processing method in which contributions of each of a plurality of materials of the specimen to said observed spectral image are unmixed, the spectral image processing method comprising:
- an evaluating step of evaluating reliability of each component of said observed spectral image based on a predicted spectral image generated from said observed spectral image by processing image data of said observed spectral image;
- and
- a reflecting step of reflecting a result of said evaluation in a content of said unmixing.
Dependencies are inferred from the claim text.