Analog data-input device provided with a pressure sensor of a microelectromechanical type

A data-input device, comprising:

• an actuator element;
• and
• a sensor mechanically coupled to said actuator element and including first and second sensitive elements integrated in respective bodies of semiconductor material, each of said first and second sensitive elements including a microelectromechanical pressure sensor configured to detect a respective direction of actuation of said actuator element and to generate electrical control signals;
• a package having an open chamber formed therein, the first and second sensitive elements being positioned inside the chamber;
• a membrane positioned over an opening of the chamber, the actuator element being coupled to the membrane;
• and
• an elastomeric material positioned inside of the chamber, covering the sensor and acting to transmit pressure exerted on the membrane to the sensor, thereby mechanically coupling the actuator element to the sensor.

An electronic apparatus comprising:

• a data-input device having:
• a chamber;
• an elastomeric material substantially filling the chamber;
• an actuator element including a membrane closing the chamber;
• a sensor including a body made of semiconductor material positioned in the chamber, the elastomeric material being configured to transfer pressure from the membrane to the body of semiconductor material, said body housing first and second sensitive elements configured to detect respective directions of actuation of the actuator element and to generate respective electrical control signals, each of said first and second sensitive elements including a microelectromechanical pressure sensor.

A pressure sensor comprising:

• a body of semiconductor material;
• a plurality of diaphragms formed over respective cavities in the body;
• a circuit formed in the body and configured to detect deflection of each of the plurality of diaphragms and produce a signal corresponding to a degree of deflection of each;
• and
• a package having a chamber within which the body is mounted;
• a membrane closing the chamber and forming an upper surface of the package;
• an elastomeric material covering the body and substantially filling a space between the membrane and the body such that pressure on a region of the upper surface of the package is transmitted by the elastomeric material to the body and results in selective deflection of one or more of the plurality of diaphragms that lie closest to that region of the upper surface.

A device comprising:

• a pressure sensor including a body of semiconductor material and a plurality of diaphragms formed over respective cavities in the body;
• deflection means for selectively deflecting individual ones of the plurality of diaphragms;
• and
• a circuit configured to detect deflection of each of the plurality of diaphragms and command operation of one of a plurality of functions of the device in response to a combination of deflections detected.