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US 8,044,755 B2Granted
MEMS power inductor
AssigneeNational Semiconductor Corporation
InventorsPeter Smeys, Peter Johnson
Life of this patent
Estimating the term…
Abstract
A scalable MEMS inductor is formed on the top surface of a semiconductor die. The MEMS inductor includes a plurality of magnetic lower laminations, a circular trace that lies over and spaced apart from the magnetic lower laminations, and a plurality of upper laminations that lie over and spaced apart from the circular trace.
Claims20
A semiconductor inductor comprising:
- a plurality of lower magnetic structures, each lower magnetic structure being spaced apart and electrically isolated from each other lower magnetic structure, and having a top surface;
- a non-conductive structure, the non-conductive structure touching the top surface of each lower magnetic structure;
- a conductive trace, the conductive trace touching the non-conductive structure, and lying directly over each of the lower magnetic structures;
- and
- a plurality of upper magnetic structures, each upper magnetic structure being spaced apart and electrically isolated from each other upper magnetic structure, and touching the non-conductive structure, no portion of any upper magnetic structure touching any portion of a lower magnetic structure, no portion of any upper magnetic structure touching any portion of the conductive trace.
2 more elements
Dependencies are inferred from the claim text.