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US 8,044,750 B2Granted
Nano-resonator including beam with composite structure
AssigneeSamsung Electronics Co., Ltd.
InventorsSeong Chan Jun, Sun Il Kim, Chan Wook Baik
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Abstract
A nano-resonator including a beam having a composite structure may include a silicon carbide beam and/or a metal conductor. The metal conductor may be vapor-deposited on the silicon carbide beam. The metal conductor may have a density lower than a density of the silicon carbide beam.
Claims13
A nano-resonator including a beam having a composite structure, comprising:
- a silicon carbide beam;
- a metal conductor on the silicon carbide beam, the metal conductor having a density lower than a density of the silicon carbide beam;
- and
- an oxide layer on the metal conductor.
1 more element
Dependencies are inferred from the claim text.