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US 8,044,552 B2Granted
Actuator driving system in which a drive voltage and number of electrodes parts driven changes in accordance with temperature
AssigneeKabushiki Kaisha Toshiba
InventorTamio Ikehashi
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Abstract
An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.
Claims16
An actuator driving system comprising
- an actuator which comprises a moving part and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part;
- a temperature detecting circuit which detects a temperature of a chip including the actuator, and which outputs a signal showing the temperature;
- and
- a voltage generating circuit which generates a drive voltage of the actuator based on the signal,
- wherein a value of the drive voltage is determined based on the temperature, and the number of the electrode parts to which the drive voltage is applied is changed in accordance with the temperature.
2 more elements
Dependencies are inferred from the claim text.