GaAs semiconductor substrate for group III-V compound semiconductor device

Abstract

A GaAs semiconductor substrate includes a main surface (10m) having an inclined angle of 6° to 16° with respect to a (100) plane (10a), and a concentration of chlorine atoms on the main surface (10m) is not more than 1×1013 cm−2. Further, a method of manufacturing a GaAs semiconductor substrate includes a polishing step of polishing a GaAs semiconductor wafer, a first cleaning step of cleaning the polished GaAs semiconductor wafer, an inspection step of inspecting a thickness and a main surface flatness of the GaAs semiconductor wafer subjected to the first cleaning, and a second cleaning step of cleaning the inspected GaAs semiconductor wafer with one of an acid other than hydrochloric acid and an alkali. Thereby, a GaAs semiconductor substrate that allows to obtain a group III-V compound semiconductor device having high properties even when at least one group III-V compound semiconductor layer containing not less than three elements is grown on a main surface, and a method of manufacturing the same are provided.

Dependencies are inferred from the claim text.