Semiconductor device and method of fabricating the same

Abstract

Provided is a semiconductor device including a transistor that has a silicide layer formed over a semiconductor substrate. The gate electrode of each transistor is composed of a polysilicon electrode and the silicide layer formed thereon. Each transistor further has source/drain impurity-diffused layers composed of low-concentration doped regions and high-concentration doped regions, and silicide layers formed over the source/drain impurity-diffused layers. The surface of each silicide layer is positioned above the surface of the semiconductor substrate. The silicide layers contain a silicidation-suppressive metal, and have a concentration profile of the silicidation-suppressive metal over a region of the silicide layers ranging from the surface to a predetermined depth, such as increasing the concentration from the surface of each silicide layer in the depth-wise direction of the semiconductor substrate.

Dependencies are inferred from the claim text.