Process for manufacturing a power device on a semiconductor substrate and corresponding device
AssigneeSTMicroelectronics S.r.l.
InventorsMonica Micciche, Antonio Giuseppe Grimaldi, Luigi Arcuri
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AssigneeSTMicroelectronics S.r.l.
InventorsMonica Micciche, Antonio Giuseppe Grimaldi, Luigi Arcuri
Estimating the term…
An electronic device includes a semiconductor substrate of a first conductivity type and a drain layer adjacent the semiconductor substrate and having a plurality of drains. The drain layer includes a first semiconductor layer of the first conductivity type adjacent the semiconductor substrate, and at least one second semiconductor layer of a second conductivity type adjacent the first semiconductor layer. Moreover, a plurality of first column regions of the first conductivity type extends through the at least one second semiconductor layer to contact the first semiconductor layer. A plurality of second column regions of the second conductivity type delimits the plurality of first column regions. Furthermore, a plurality of body regions of the second conductivity type are adjacent respective ones of the plurality of second column regions.
A method of manufacturing an electronic device comprising:
An electronic device comprising:
An electronic device comprising:
Dependencies are inferred from the claim text.