Nonvolatile semiconductor memory device and producing method thereof
AssigneeKabushiki Kaisha Toshiba
InventorsHiroyuki Nagashima, Hirofumi Inoue, Hideyuki Tabata, Masanori Komura, Eiji Ito
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AssigneeKabushiki Kaisha Toshiba
InventorsHiroyuki Nagashima, Hirofumi Inoue, Hideyuki Tabata, Masanori Komura, Eiji Ito
Estimating the term…
A cell array includes a memory cell region in which memory cells are formed and a peripheral region that is provided around the memory cell region. In the memory cell region, first lines are extended in parallel with a first direction, and the first lines are repeatedly formed at first intervals in a second direction orthogonal to the first direction. In the peripheral region, each of the first lines located at (4n−3)-th (n is a positive integer) and (4n−2)-th positions in the second direction from a predetermined position has a contact connecting portion on one end side in the first direction of the first line. In the peripheral region, each of the first lines located at (4n−1)-th and 4n-th positions in the second direction from the predetermined position has the contact connecting portion on the other end side in the first direction of the first line. The contact connecting portion is formed so as to contact a contact plug extended in a laminating direction.
A nonvolatile semiconductor memory device comprising:
A nonvolatile semiconductor memory device comprising:
Dependencies are inferred from the claim text.