Nitride semiconductor light emitting device and fabricating method thereof
AssigneeLG Innotek Co., Ltd.
InventorSeung Huyn Yang
Life of this patent
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Abstract
A nitride semiconductor light emitting device including: a first nitride semiconductor layer; an active layer formed on the first nitride semiconductor layer and including at least one barrier layer grown under hydrogen atmosphere of a high temperature; and a second nitride semi conductor layer formed on the active layer, and a method of fabricating the same are provided. According to the light emitting device and method of fabricating the same, the light power of the light emitting device is increased and the operation reliability is enhanced.
Claims14
A semiconductor light emitting device, comprising:
- a first conductive type semiconductor layer;
- an active layer formed on the first conductive type semiconductor layer,
- wherein the active layer is a multi-quantum well structure having a plurality of well layers alternatively stacked with a plurality of barrier layers;
- and
- a second conductive type semiconductor layer formed on the active layer,
- wherein a first well layer of the plurality of well layers has a composition of InXGa1-XN (0≦x≦1) with an In (Indium) composition ratio of 10-20%,
- wherein a first barrier layer of the plurality of the barrier layers is formed on the first well layer and has a composition of InYGa1-YN (0≦Y≦1) with an In (Indium) composition ratio of less than 10%,
- wherein the active layer comprises 4 to 10 pairs of periodically repeated well layers and barrier layers, each pair including a corresponding barrier layer on a corresponding well layer,
- wherein one of the pairs of periodically repeated well layers and barrier layers comprises a seed layer of InN, and
- wherein an upper surface of the seed layer is in direct contact with a lower surface of the corresponding well layer and a lower surface of the seed layer is in direct contact with an upper surface of the corresponding barrier layer.
A semiconductor light emitting device, comprising:
- a first conductive type semiconductor layer;
- an active layer formed on the first conductive type semiconductor layer;
- and
- a second conductive type semiconductor layer formed on the active layer,
- wherein the active layer comprises at least two pairs of periodically repeated well layers and barrier layers, each pair including a corresponding barrier layer on a corresponding well layer, each well layer having a composition of InxGa1-xN (0≦x≦1)
- wherein at least one of the barrier layers is 30-200 Å thick,
- wherein one of the pairs of periodically repeated well layers and barrier layers comprises a seed layer,
- wherein the seed layer has a thickness smaller than a well layer thickness, and
- wherein an upper surface of the seed layer is in direct contact with a lower surface of a corresponding well layer and a lower surface of the seed layer is in direct contact with an upper surface of a corresponding barrier layer.
Dependencies are inferred from the claim text.