Lens coil cooling of a magnetic lens
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftecknik mbH
InventorPavel Adamec
Life of this patent
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Abstract
A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic field, a pole piece to guide the magnetic field, a heat shield, which is connected to a cooling system, and a thermal insulation layer provided between the heat shield and the coil.
Claims19
A magnetic lens for a charged particle beam device, comprising:
- a coil including coil windings to be excited for generation of a magnetic field;
- a pole piece to guide the magnetic field;
- a heat shield, which is in thermal contact with a cooling system;
- and
- a thermal insulation layer provided between the heat shield and the coil, wherein the cooling system is provided within a base plate and the base plate is connected to the heat shield to provide thermal contact with the cooling system and with the heat shield.
A method of manufacturing a magnetic lens of a charged particle beam device, comprising:
- providing a coil;
- shielding the coil with a sheet of thermally conductive material;
- thermally isolating the sheet of thermally conductive material from portions of the coil;
- thermally connecting the thermally conductive material to a heat sink;
- and
- providing a cooling system within a base plate, wherein the base plate is connected to the sheet of thermally conductive material to provide thermal contact with the sheet of thermally conductive material and with the cooling system.
A magnetic lens for a charged particle beam device, comprising:
- a coil including coil windings to be excited for generation of a magnetic field;
- a housing disposed around the coil;
- a heat shield disposed around the housing and the coil, wherein the heat shield is thermally isolated from the coil and is in thermal contact with a cooling system;
- a thermal insulation layer disposed in a gap between the heat shield and the housing;
- and
- a pole piece to guide the magnetic field generated by the coil, wherein the coil is disposed within an area surrounded by the pole piece, wherein the housing includes cooling pipes connected to the cooling system.
Dependencies are inferred from the claim text.