Micro-column with simple structure
AssigneeCEBT Co., Ltd.
InventorsHo Seob Kim, Byeng Jin Kim
Life of this patent
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Abstract
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.
Claims8
An electron column comprising:
- an electron emission source, and
- a single lens for performing functions of a source lens, a focusing lens, and a deflector simultaneously,
- wherein the lens consists of:
- an upper lens layer configured to function as an extractor for inducing emission of electrons from the electron emission source;
- a central lens layer configured to perform functions for focusing and deflecting electrons from the electron emission source;
- and
- a lower lens layer configured to perform a focusing function that causes electron beam focused on a sample and limits electrons from the electron emission source so as to form an effective electron beam.
Dependencies are inferred from the claim text.