Method for providing electrical connections to spaced conductive lines

A method of fabricating an integrated circuit structure on a support structure, the method comprising:

• forming a plurality of linearly extending lines of at least one material;
• cutting said material lines at an angle relative to a linearly extending direction to form respective angled end faces at each of the material lines, said respective angled end faces being spaced in the linearly extending direction;
• and
• forming an extension of each of said material lines at each respective angled end face,
• wherein said material lines are parallel material lines, and
• wherein said parallel material lines are formed using a self-assembled block copolymer mask.

A method of fabricating an integrated circuit structure, the method comprising:

• forming a plurality of parallel spaced linearly extending material lines;
• etching said material lines at an angle relative to the extending direction of said material lines to form respective angled end faces at each of the parallel material lines, said respective angled end faces being spaced in the linearly extending direction, and said respective angled end faces having a length that is greater than a width of the respective material lines;
• forming a contact landing pad mask in contact with each of said angled end faces;
• and
• using said material lines and said contact landing pad masks as an etch mask to etch a conductive material below said material lines and contact landing pad masks to form a plurality of conductive lines with a half-pitch of 45 nm or less having respective conductive contact landing pad areas.

A method of fabricating an integrated circuit structure, the method comprising:

• forming a plurality of parallel spaced linearly extending conductive lines;
• etching said conductive lines at an angle relative to the extending direction of said conductive lines to form respective angled end faces at each of said conductive lines, said angled end faces being spaced in the linearly extending direction, and said respective angled end faces having a length that is greater than a width of the respective conductive lines;
• and
• forming an electrical contact landing pad in contact with each of said respective angled end faces.